EI / SCOPUS / CSCD 收录

中文核心期刊

张凯, 周铁英, 王欢, 袁世明, 郭钊, 姜开利, 白桂珍. 1mm压电柱式超声微电机的研制[J]. 声学学报, 2004, 29(3): 258-261. DOI: 10.15949/j.cnki.0371-0025.2004.03.012
引用本文: 张凯, 周铁英, 王欢, 袁世明, 郭钊, 姜开利, 白桂珍. 1mm压电柱式超声微电机的研制[J]. 声学学报, 2004, 29(3): 258-261. DOI: 10.15949/j.cnki.0371-0025.2004.03.012
ZHANG Kai, ZHOU Tieying, WANG Huan, YUAN Shiming, GUO Zhao, JIANG Kaili, BAI Guizhen. Study on piezoelectric cylinder micro ultrasonic motor with 1 mm diameter[J]. ACTA ACUSTICA, 2004, 29(3): 258-261. DOI: 10.15949/j.cnki.0371-0025.2004.03.012
Citation: ZHANG Kai, ZHOU Tieying, WANG Huan, YUAN Shiming, GUO Zhao, JIANG Kaili, BAI Guizhen. Study on piezoelectric cylinder micro ultrasonic motor with 1 mm diameter[J]. ACTA ACUSTICA, 2004, 29(3): 258-261. DOI: 10.15949/j.cnki.0371-0025.2004.03.012

1mm压电柱式超声微电机的研制

Study on piezoelectric cylinder micro ultrasonic motor with 1 mm diameter

  • 摘要: 介绍了一种超声波微电机的设计研制工作。这种基于压电柱弯曲振动模态的超声波微电机,其直径仅有1 mm细,长约5 mm,重量仅有36 mg。它是采用压电柱作为定子,在压电柱的表面均匀分割出四个电极,进行极化和施加驱动电压。详细介绍了极化方式的选择,电极间隔的优化设计以及对原型样机的性能测试。实验表明,该电机能承受350Vpp的驱动电压,获得1800 rpm的转速和4 μNm的堵转力炬。此外,这种电机具有明显的微型化优势,根据现有工艺还可使电机直径减小到0.5 mm左右。

     

    Abstract: A tiny ultrasonic motor was constructed by using a cylindrical piezoelectric ceramic as stator. The fabricated tiny motor has a diameter of 1 mm, a length of 5 mm and a/weight of 36 mg. Four electrodes were deposited on the stator's surface and evenly distributed along the circumferential direction. A polarization method was developed for the stator and the space between two adjacent electrodes was carefully designed. By using the bending mode vibration of the stator, the tiny motor shows a performance with 1800 rpm speed and 4 μNm stalled torque and can be bear higher drive voltage until 350 Vpp. With the same technique, fabrication of even smaller motor can be envisioned.

     

/

返回文章
返回