一种热对流式MEMS二维质点振速传感器

许相园; 孙远; 赵静; 葛浩; 鲍明; 卢明辉; 朱梦尧; 黎椿建; 李晓东

doi:10.15949/j.cnki.0371-0025.2023.03.013

一种热对流式MEMS二维质点振速传感器

doi: 10.15949/j.cnki.0371-0025.2023.03.013

许相园^{1, 2, 3,},
孙远⁴,
赵静^{1, 2},
葛浩⁴,
鲍明^{1, 2, 3, 5, ,},
卢明辉^4, ,,
朱梦尧^{6, 7},
黎椿建⁶,
李晓东^{1, 2, 3}

1.
中国科学院声学研究所　北京　100190
2.
中国科学院噪声与振动重点实验室(声学研究所)　北京　100190
3.
中国科学院大学　北京　100049
4.
南京大学固体微结构物理国家重点实验室&现代工程与应用科学学院　南京　210093
5.
西北工业大学自动化学院　西安　710072
6.
华为终端有限公司　深圳　518129
7.
上海大学通信与信息工程学院　上海　200444

基金项目: 国家自然科学基金项目(11774379)资助

详细信息

通讯作者:
鲍明, baoming@mail.ioa.ac.cn

卢明辉, luminghui@nju.edu.cn

中图分类号: 43.38
计量
- 文章访问数: 41
- 被引次数: 0
出版历程
- 收稿日期: 2022-03-09
- 修回日期: 2022-05-01
- 刊出日期: 2023-05-11

A novel two-dimensional thermal-convection based MEMS acoustic vector sensor

XU Xiangyuan^{1, 2, 3
,},
SUN Yuan⁴,
ZHAO Jing^{1, 2},
GE Hao⁴,
BAO Ming^{1, 2, 3, 5
, ,},
LU Minghui^{4
, ,},
ZHU Mengyao^{6, 7},
LI Chunjian⁶,
LI Xiaodong^{1, 2, 3}

1.
Institute of Acoustics, Chinese Academy of Sciences　Beijing　100190
2.
Key Laboratory of Noise and Vibration Research, Institute of Acoustics, Chinese Academy of Sciences　Beijing　100190
3.
University of Chinese Academy of Sciences　Beijing　100049
4.
National Laboratory of Solid State Microstructures & Department of Materials Science and Engineering, Nanjing University　Nanjing　210093
5.
School of Automation, Northwestern Polytechnical University　Xi'an　710072
6.
Huawei Terminal Co., Ltd.　Shenzhen　518129
7.
School of Communication & Information Engineering, Shanghai University　Shanghai　200444

摘要

摘要:
由空气质点振速传感器和声压传感器组成的矢量传声器是测量声场空间信息的重要方式。本文设计了一种新型热对流式二维质点振速传感器, 不同于传统平行线式传感机制, 该器件由多线进行交叉连结形成一个中央十字加热器和四个直角测温线, 构成新的局域加热和温度传感方式, 基于此设计能够获得更高的灵敏度并具有理想的正交性。通过数值分析对其传感机制进行了详细分析, 并使用MEMS工艺进行器件制备和性能验证。实验结果表明, 该器件具有良好的响应灵敏度和接近完美的正交指向性。所提出器件在体积受限的声场测量中具有潜在应用价值。
- 二维矢量传声器 /
- 质点振速 /
- 热线式传感器 /
- 微加工
Abstract:
An acoustic vector sensor is an important sensor for capturing sound field information. In various applications, a precise integrated 2D sensor is desired, but manufacturing remains challenging. A novel 2D thermal convection based acoustic vector sensor is introduced, which consists of crossed multiple wires. The central crossed wire acts as a heater and the four right-angle shape wires act as thermal detectors. Based on this design, the sensor provides higher sensitivity and a direct two-dimensional acoustic particle velocity measurement. The sensor is optimized by numerical simulation and then fabricated using MEMS process. Finally, experiments have demonstrated that the device has good sensitivity response and orthogonal characteristics.
- Acoustic vector sensor /
- Particle velocity /
- Hot-wire sensor /
- Microfabrication

图 1 所设计传感器示意图

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图 2 $x$轴传感过程示意图(红色线为加热线, 灰色线为测温线)

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图 3 点加热时传感原理和温度场分布 (a) 传感示意图 (中心红色线为加热线, 两侧灰色线为测温线); (b) 稳态和受扰动时温度场分布

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图 4 线加热时传感原理和温度场分布 (a) 传感示意图 (中心红色线为加热线, 两侧灰色线为测温线); (b) 稳态和受扰动时温度场分布

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图 5 温度变化与频率响应之间的关系

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图 6 线热源的温度梯度与位置之间关系

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图 7 点热源和线热源受扰动时温度变化与位置之间关系

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图 8 所制备传感器SEM照片

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图 9 传感器制备工艺流程

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图 10 实验测试装置

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图 11 线热源模式、点热源模式以及两种模式共同工作时的灵敏度频响曲线

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图 12 传感器在500 Hz和1000 Hz激励下指向性测试结果

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