The insertion loss of shear horizontal surface acoustic wave pressure sensor with single-phase unidirectional transducer

In order to realize the low loss design of shear horizontal surface acoustic wave pressure sensor,the acoustic wave energy loss performance of the sensor with InterDigital Transducer(IDT) and Single-Phase UniDirectional Transducer(SPUDT) is systemically studied.Through the establishment of a 3D periodic finite element simulation model with the SPUDT with the optimal reflection coefficient,the device surface vibration displacement and output voltage time response are calculated.By transforming the voltage signal using Fourier Transform,the insertion loss of the sensor model is obtained.Two different acoustic devices were prepared and their frequency characteristics and sensitivity were tested as well.Compared with uniform IDT,the insertion loss of sensor with SPUDT is reduced by 5.2 dB and 5.6 dB in simulation and experiment,and sensitivity of the sensor with SPUDT is about twice that of the sensor with uniform IDT.The results show that SPUDT,as transducer of shear horizontal surface acoustic wave pressure sensor,can effectively reduce the energy loss of acoustic wave and improve the detection sensitivity.In addition,the construction of the 3D periodic finite element simulation model is beneficial to the acoustic wave loss analysis of acoustic measuring devices and the realization of a high-precision and miniaturized acoustic measurement system.