A study on temperature characteristic of multi-waveguides Love wave device used for gas sensor

This paper aimed at extracting optimal structural parameters for multi-waveguides Love wave device to improve its temperature stability.The theoretical model dealing with the Love wave propagation in multi-waveguides was established in the first,the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions.Combing with the dispersion characteristics and Tomar's method,the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted,and confirmed by the following experimental results.Excellent temperature coefficient of the Love wave device with SU-8/SiO₂ on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm/℃,which agrees well with the calculated results.The optimized Love wave device is useful and practical in gas sensing application.